Graphite Spare Parts for Ion Implantation

Graphite Spare Parts for Ion Implantation

Ion implantation is an important process in semiconductor production. Implantation systems dope wafers with foreign atoms to change material properties, such as conductivity or crystal structure. The beam path is the heart of the implanter system.
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Description

 

Introduction

The Graphite Spare Parts for Ion Implantation for Ion ImplantationGraphite spare parts for ion implantation are high-purity, precision-machined graphite components used in ion implanter systems during the semiconductor manufacturing process.

 

Features

 

Ultra-high purity materials

Our products are made of high-purity isostatic graphite with a purity of more than 99.99%, and the impurity content is controlled below 5ppm, ensuring that the wafer will not be contaminated during the ion implantation process.

 

Excellent thermal stability

The Graphite Spare Parts for Ion Implantation can work continuously in a high temperature environment of 800℃, and the thermal expansion coefficient is only 4.5×10⁻⁶/℃ (room temperature to 1000℃), which is 5-8 times lower than that of metal materials, ensuring that the dimensional stability can be maintained when the temperature changes drastically.

 

Precise dimensional control

Adopting CNC precision machining, the tolerance of key dimensions is controlled within ±0.02mm, and the surface roughness Ra≤0.8μm, ensuring high-precision matching with the ion implanter and reducing the equipment debugging time.

 

Wide applicability
The Graphite Spare Parts for Ion Implantation can be applied to key consumables such as beam stoppers, plates, electrodes, beam channel bushings (collimators), injection cavity liners, silicon wafer trays, and thermal baffles.

 

Custom

 

BFXY provides customized product design tailored to specific customer requirements, meets specialized process demands, enhances product quality through advanced engineering and manufacturing, and offers full ODM/OEM services.

 

Packaging

 

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Available packaging options include paper boxes, wooden crates, or custom solutions based on customer requirements.

 

Delivery Time

 

 

Orders are typically shipped within 7 to 25 days after the advance payment is received.

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Our Service

 

Processing Based on Supplied Samples
We inspect and map customer-supplied samples, produce small-batch prototypes, and move into full-scale production once the samples have been tested and approved by the customer.

 

Processing with Supplied Materials
Customers provide graphite raw materials, and we carry out precision machining according to their specifications. The entire process is strictly controlled to ensure product consistency and quality.

 

All-Inclusive Services
BFXY offers one-stop solutions, including sourcing raw materials based on customer specifications, followed by design, manufacturing, quality inspection, and related services.

 

Certification

 

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The company began to establish and improve a quality management system based on ISO9001:2008 in 2005. At the same time, the production of batch products was tracked and recorded using CPK management in the international Six Sigma quality system to ensure product quality.

 

 

FAQ

Q: Are you a manufacturer or distributor of graphite?

A: BFXY is a professional manufacturer of graphite products. We mainly produce various graphite molds and CFC products. Our company has been established for more than twenty years and has rich experience in export trade.

Q: Do you offer custom products?

A: We support customizing products according to customer needs. We will make every effort to meet any reasonable demands from customers while ensuring quality, and provide the best service to customers.

Q: Do you have export experience?

A: Yes, we have extensive experience in exporting our products to various countries including Europe and South America.

 

 

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