Introduction
The PECVD Graphite Boat are precision graphite supports designed specifically for the plasma enhanced chemical vapor deposition process.
Specification
|
Category |
Specifications |
Remark |
|
125mm*125mm 156mm*156mm Single crystal/polycrystalline |
Thirteen pcs Fifteen pcs Seventeen pcs Nineteen pcs |
Using imported graphite materials for processing, multiple PECVD equipment can be used |
Introduction to accessories for graphite boats:
|
Category |
Name and specifications |
|
Type 125 |
125 graphite boat edge sheet |
|
125 graphite boat middle piece |
|
|
Type 156 |
156 graphite boat edge sheet |
|
156 graphite boat middle piece |
|
|
Graphite screw Ceramic screw |
M6*215 |
|
M6*190 |
|
|
M6*275 |
|
|
M8*215 |
|
|
M8*190 |
|
|
M8*160 |
|
|
M8*245 |
|
|
Graphite nut Ceramic nut |
M6 |
|
M8 |
|
|
Ceramic tube |
Graphite material indicators:
|
Bulk Density |
g/cm³ |
1.90 |
|
Specific Resistance |
μΩm |
10-12 |
|
Heat conductivity |
W/m.k |
100-120 |
|
Coefficient of thermal expansion |
10-6/℃ |
5.1 |
|
Shore Hardness |
HSD |
72 |
|
Flexural Strength |
MPa |
70 |
|
Compressive Strength |
MPa |
160 |
|
Elastic strength |
Gpa |
12 |
|
Porosity |
% |
11 |
|
Ash Content |
PPM |
/ |
|
Purified ash Content |
PPM |
50 |
Features
Precision machining
Through CNC machining and laser cutting technology, the dimensional tolerance is controlled within ±0.05 mm. High-precision machining ensures that our products are perfectly matched with various PECVD equipment.
Excellent thermal performance
The thermal conductivity of our products reaches 125W/m·K (axial), and with the special slot design, the temperature difference of the wafer bearing surface can be controlled within ±2℃.
Low particle contamination
The surface roughness of PECVD Graphite Boat is Ra≤0.4μm. With the special cleaning process, the number of particle contaminants (＞0.3μm) is <50/piece, meeting the requirements of Class 10 clean rooms.
Customizable
Our products support 5-200 pieces of capacity customization, and can carry up to Φ300mm wafers.
Custom
Beijing North Xin Yuan Technology Co., Ltd. has a professional technical team that supports product customization based on customer requirements, including packaging customization. We also offer ODM and OEM services.
Packaging
Available packaging options include paper boxes, wooden crates, or customized solutions based on customer requirements.
Delivery Time
We usually ship the goods within 3-20 days after receiving the advance payment.
Our Service
1. The technical team can assist customers with product resizing and repairs.
2. If customers are not satisfied, we provide free samples; only shipping costs apply.
3. We supply product test reports and material specifications to help users better understand and utilize the data.
Certification
Our factory covered 40,000 square meters and comprises 6 large-scale production workshops. It's equipped with a variety of advanced equipment, different production processing teams, inspection and packaging teams. We can provide the most timely and efficient production services for different products and customers.
The company began to establish and improve a quality management system based on ISO9001:2008 in 2005. At the same time, the production of batch products was tracked and recorded using CPK management in the international Six Sigma quality system to ensure product quality.
FAQ
Q: Are you a manufacturer or distributor of graphite?
A: BFXY is a professional manufacturer of graphite products. We mainly produce various graphite molds and CFC products. Our company has been established for more than twenty years and has rich experience in export trade.
Q: Do you offer custom products?
A: We support customizing products according to customer needs. We will make every effort to meet any reasonable demands from customers while ensuring quality, and provide the best service to customers.
Q: How do you ensure your product quality?
A: Every customer deserves the highest quality contract manufacturing and packaging services. That's why our industry-leading quality system extends to the entire supply chain - from product production, inspection, to packaging - and every employee at every stage puts in 100% effort to serve customers. This ensures high-quality products that you can trust and timely delivery. Complete traceability is the standard here, while fully complying with ISO-9001 and FDA standards. We also have internal laboratories that constantly help us validate and test solutions, as well as innovate product processes.
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